I. Yu. Stekolin: search on Z-Library

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1

Calibration of scanning electron microscopes by means of pitch structures

Yu. A. Novikov, A. V. Rakov, I. Yu. Stekolin

Journal:

Measurement Techniques

Year:

1995

Language:

english

File:

PDF, 235 KB

english, 1995

2

Calibrating a scanning electron microscope by means of a linear measure having one certified dimension

Yu. A. Novikov, A. V. Rakov, I. Yu. Stekolin

Journal:

Measurement Techniques

Year:

1994

Language:

english

File:

PDF, 216 KB

english, 1994

3

Measurement of linear dimensions of submicron structures with a scanning electron microscope

V. A. Danilov, Yu. A. Novikov, A. V. Rakov, I. Yu. Stekolin

Journal:

Measurement Techniques

Year:

1995

Language:

english

File:

PDF, 290 KB

english, 1995

4

Measuring the diameter of an electron probe with a scanning electron microscope

Yu. A. Novikov, A. V. Rakov, I. Yu. Stekolin

Journal:

Measurement Techniques

Year:

1995

Language:

english

File:

PDF, 228 KB

english, 1995

5

Calibration of REM with elimination of systematic linear-gauge error

Yu. A. Novikov, A. V. Rakov, I. Yu. Stekolin

Journal:

Measurement Techniques

Year:

1995

Language:

english

File:

PDF, 227 KB

english, 1995

6

Determination of the diameter of the electron probe of a scanning electron microscope

Yu. A. Novikov, A. V. Rakov, I. Yu. Stekolin, I. B. Strizhkov

Journal:

Measurement Techniques

Year:

1993

Language:

english

File:

PDF, 192 KB

english, 1993

7

Scanning electron microscope calibration with simultaneous electron probe diameter determination

Yu. A. Novikov, A. V. Rakov, I. Yu. Stekolin, I. B. Strizhkov

Journal:

Measurement Techniques

Year:

1994

Language:

english

File:

PDF, 237 KB

english, 1994

8

SEM Measurement of the linear dimensions of relief submicron structures by the method of “invariant” points

V. A. Danilov, Yu. A. Novikov, A. V. Rakov, I. Yu. Stekolin

Journal:

Measurement Techniques

Year:

1995

Language:

english

File:

PDF, 263 KB

english, 1995

9

Calibration of scanning electron microscopes for measuring the dimensions of submicron relief elements

Yu. A. Novikov, S. V. Peshekhonov, A. V. Rakov, A. N. Simonov, I. Yu. Stekolin, I. B. Strizhkov, V. V. Tsybul'skii

Journal:

Measurement Techniques

Year:

1993

Language:

english

File:

PDF, 301 KB

english, 1993

10

Scanning electron microscope calibration with input data checking

Yu. A. Novikov, A. V. Rakov, I. Yu. Stekolin

Journal:

Measurement Techniques

Year:

1995

Language:

english

File:

PDF, 190 KB

english, 1995

11

Measurement of the divergence angle of the electron microprobe of a scanning electron microscope

Yu. A. Novikov, A. V. Rakov, I. Yu. Stekolin

Journal:

Measurement Techniques

Year:

1996

Language:

english

File:

PDF, 176 KB

english, 1996

12

Accuracy in calibrating electron microscopes with silicon slot structures

Yu. A. Novikov, I. Yu. Stekolin

Journal:

Measurement Techniques

Year:

1995

Language:

english

File:

PDF, 248 KB

english, 1995